Thermal decomposition of 6H–SiC(0001) under an argon atmosphere is a promising technique to fabricate large-scale epitaxial graphene monolayers for electronic applications. In this manuscript, we report on the intercalation of argon, hydrogen and oxygen atoms underneath a graphene buffer layer (BL) on SiC(0001), involving bond formation between the intercalated agent and Si atoms. Density Functional Theory calculations were performed to investigate the atomic structure, stability and electronic properties of quasi free-standing monolayer graphene and bilayer graphene, accomplished by intercalation. According to our results, as the Ar intercalated atoms saturate the silicon dangling bonds in the upper SiC surface, the BL is completely detached from the substrate and transformed into free-standing graphene. Ar intercalation would be hindered by the concurrent and thermodynamically more spontaneous adsorption of Ar atop the graphene layers, resulting in a pronounced decrease of the process efficiency. High Ar-coverage regimes and low kinetic barriers for Ar intercalation might shift the intercalation/adsorption balance. These factors as well as strategies such as ion implantation could be explored to identify more favorable conditions to experimentally test Ar intercalation as a simple method to achieve control of the electronic properties of the BL and help preserve the unique characteristics of graphene.
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