Nanowires of silicon oxide SiOx (x ā¤ 2) were synthesized from a mixture of monosilane and hydrogen (helium, argon) by gasājet electron beam plasma chemical vapor deposition (GJ EBP CVD) method with simultaneous supply of oxygen into the vacuum chamber. The synthesis was performed on monocrystalline silicon and glass substrates coated with micronāsized particles of a tin catalyst. In particular, aligned arrays of nanowire bundles (microropes) were synthesized from a mixture of monosilane and hydrogen (argon). A bundle of amorphous silicon oxide nanowires, each of which is about 15 nm in diameter, grows from a catalyst particle. The growth rate of the microropes is about 25 nm sā1 at a synthesis temperature of 320ā330 Ā°C. The morphology of the nanostructures was investigated by transmission and scanning electron microscopy, their composition by Xāray energy dispersive spectroscopy and optical properties by photoluminescence spectroscopy. The synthesis was carried out using the wellāknown vaporāliquidāsolid (VLS) mechanism. A model is proposed for the synthesis of the nanostructures by the above method, including the formation of aligned bundles of nanowires (microropes) due to nonuniform heating of the catalyst particle by directed plasma flow. The obtained nanostructures have intense photoluminescence in the visible region of the spectrum at room temperature.