Electrochemical micromachining (EMM) could be used as one the best micromachining technique for machining electrically conducting, tough and difficult to machine material with appropriate machining parameters combination. This paper attempts to establish a comprehensive mathematical model for correlating the interactive and higher-order influences of various machining parameters, i.e. machining voltage pulse on/off ratio, machining voltage, electrolyte concentration, voltage frequency and tool vibration frequency on the predominant micromachining criteria, i.e. the material removal rate and the radial overcut through response surface methodology (RSM), utilizing relevant experimental data as obtained through experimentation. Validity and correctiveness of the developed mathematical models have also been tested through analysis of variance. Optimal combination of these predominant micromachining process parameters is obtained from these mathematical models for higher machining rate with acuuracy. Considering MRR and ROC simultaneously optimum values of predominant process parameters have been obtained as; pulse on/off ratio, 1.0, machining voltage, 3 V, electrolyte concentration, 15 g/l, voltage frequency of 42.118 Hz and tool vibration frequency as 300 Hz. The effects of various process parameters on the machining rate and radial overcut are also highlighted through different response surface graphs. Condition of machined micro-holes are also exhibited through the SEM micrographs in this paper. Pulse voltage pattern during electrochemical micromachining process has been analyzed with the help of voltage graphs. Irregularities in the nature of pulse voltage pattern during electrochemical micromachining have been observed and the causes of these irregularities are further investigated.