Abstract Carbon nanotube based field effect transistors (CNT-FETs) have been considered as a preferred alternative to the traditional Si-based MOSFETs. Here we investigated the electrostatic discharge (ESD) failure characteristics of single-walled CNT (SWCNT) FET. In ESD event, the instantaneous high current will generate an amount of heat in the CNT-FET channel resulting in its thermal failure owing to its randomly aligned SWCNT networks. The CNT-FET failure mechanism and its ESD characteristics with various key parameters are studied in detail. These insights provide new ideas and a guidance for the research and application of CNT-FETs. In order to achieve a full chip ESD protection network for CNT chips, we referred to commonly used ESD devices in silicon-based processes and designed CNT based ESD devices, including GD-CNT-FET (Gated-VDD CNT-FET) and RC-CNT-FET (RC trigger CNT-FET). CNT-FET with randomly aligned SWCNT networks, whose failure current level is only about 50µA/µm, needs larger areas to achieve effective ESD protection.
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