Due to their small size, SnO2-based microhotplate gas sensors can be used to develop a portable, sensitive, and low-cost gas monitoring system to detect, for example, leakage of hazardous gases. These devices, because of their low thermal mass, allow rapid temperature changes of the sensing material as a mode of sensor operation. To gain insight into the conductance response of microhotplate sensors, the basic physical and chemical processes involved in the sensing operation have been modeled. In this paper, intrinsic and extrinsic surface state trapping models are presented to describe the dynamic conductance responses of microhotplate gas sensors to argon and to air, respectively. These models relate the change in the conducting electron density to the change of the intrinsic/extrinsic surface state density based on potential barrier theory. Model parameters are estimated from one set of experiments, and then the models are used to predict output signals in a different set of experiments. Excellent agreement is achieved between the predicted and measured responses. The models can predict the fast temperature programmed sensing responses of microhotplate sensors on a time scale ranging from seconds to milliseconds. One interesting aspect of this modeling is that it correctly predicts that a transient conductivity response will occur when the temperature is cycled even if only argon is present. This paper also shows evidence for the effect of surface states on the conductance response of tin oxide films to these rapid temperature changes.
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