The PTW 60023 microSilicon is a new unshielded diode detector for small-field photon dosimetry. It provides improved water equivalence and a slightly larger sensitive region diameter in comparison to previous diode detectors in this range. In this study we evaluated the correction factors relevant to commissioning a CyberKnife System with this detector by Monte Carlo simulation and verified this data by multi-detector measurement comparison. The correction factors required for output factor determination were substantially closer to unity at small field sizes than for previous diode versions (e.g. = 0.981 at 5 mm field size which compares with corrections of 5%–6% with other stereotactic diodes). Because of these differences we recommend that corrections to small field output factor measurements generated specifically for the microSilicon detector rather than generic data taken from other diode types should be used with this new detector. For depth-dose measurements the microSilicon is consistent with a microDiamond detector to <1% (global), except at depths <10 mm where the diode gives a significantly lower measurement, by 6%–8% at the surface. For profile measurements, the microSilicon requires negligible corrections except in the low dose region outside the beam, where it underestimates off-axis-ratio (OAR) for small fields and overestimates for large fields. Where this effect is most noticeable at the largest field size and depth (115 mm × 100 mm and 300 mm depth) the microSilicon overestimates OAR by 2.3% (global) in the profile tail. This is consistent with other unshielded diodes.