In present work, hybrid structures of Si Nanocrystals (Si-ncs) and Carbon Nanotubes (CNTs) with bead-like architecture have been synthesized by exposing pristine CNTs to silane (SiH4) at 200 ºC. The exposed CNTs were annealed in Ar ambient at 500ºC in a catalytic chemical vapor deposition chamber. High-resolution transmission electron microscopy (HRTEM) elucidated that the bead-like architecture has well-defined crystalline nature. X-ray photoelectron spectroscopy (XPS) was used to study the nature of chemical bonding and structural functionalization/defects caused by silane exposure and annealing on the nanotube surface. XPS results indicated in-diffusion of Si in the CNT cavity as well reduction in oxygen content on the top surface of the CNTs. X-ray diffractometry was used to further confirm the formation of the crystalline hybrid structures. From the present work it is inferred that a controlled synthesis of hybrid structures (CNT-Si ncs) with bead-like architecture can be achieved by a simple CVD method for various applications