The motion of interstitial atoms (one of the point defects) in material is random under certain temperature. However, the diffusion of interstitial atoms has priority along some certain directions to the others, so it is necessary to reveal the phenomenon (the phenomenon also can be called anisotropic). In order to illustrate the anisotropic and reveal the magnitude of probability of the micro crack formation along crystal axes, some formulae derived from former literatures have been adopted, and the values of diffusion probability and diffusivity of interstitial atoms-Ti or Al along 〈110〉and〈100〉have been calculated. The conclusion that the diffusion of interstitial atoms along different crystal axis has different diffusivity is verified by the comparison of the results of calculations.
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