Fe/Pt multilayer films with an Ag, Ti or Bi underlayer were prepared by magnetron sputtering and effect of the underlayer on the magnetic properties of annealed Fe/Pt multilayer films was also investigated. Our results demonstrate that Ag underlayer has little effect on the in-plane coercivity H c of the Fe/Pt multilayer film due to the formation of Ag and L1 0-FePt phases in the films. The H c of Ti/[Fe/Pt] 13 film keeps on rising with the increasing annealing temperature T a up to 500 °C and then decreases with the further increasing T a. The reason should be attributed to the formation of some intermetallic compounds between Ti and Fe; Pt at a high T a which is harmful to the structure of L1 0-FePt. The H c of [Fe/Pt] 13 films is enhanced by the Bi underlayer, which can be understood by considering the promotion of the L1 0-FePt phase by Bi diffusion.
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