Tungsten (W) is cited as a candidate first-wall material in fusion reactors owing to its outstanding thermal properties and erosion resistance. An important issue is that the energetic isotopes of hydrogen, tritium (T) and deuterium (D) and helium (He) particles damage the surface of W in fusion reactors. He particles cause more notable damage than D or T because the binding energy of defects and He is larger than that of defects and D or T. In this study, well-annealed W specimens were implanted with 5 keV He ions at room temperature and irradiation dosages of 1.0 × 1020 and 2.5 × 1021 ions/m2. Then, thermal desorption spectroscopy analysis was performed by heating the samples to 1973 K at a ramping rate of 0.5 K/s. Thermal desorption of He in the sample irradiated with a low dosage occurred at 1400 and 1960 K, whereas that in the sample irradiated with a high dosage occurred at 740, 1050 and 1500 K. According to the microstructures observed using transmission electron microscopy, both peaks in the former case were attributed to He de-trapping from irradiation to nduced helium-vacancy clusters of different sizes, whereas the peaks in the latter case were attributed to He de-trapping from surface defects, irradiation-induced dislocation loops and tiny helium-vacancy clusters, respectively.