To fully utilize the benefits of MV SiC-based converter and achieve high power density, the isolated auxiliary power supply (IAPS) needs to be as small as possible. However, the high insulation and low coupling capacitance requirements, considering the high voltage and high dv/dt, are constraints of size reduction. This paper proposes a MV IAPS design for high insulation capability, ultra-low coupling capacitance, and small size. The topology selection, efficiency, load regulation, coupling capacitance, and size reduction considerations are discussed. A 2.5 W MV IAPS is designed and built for a 10 kV SiC MOSFET-based 13.8 kV/100 kW three-phase converter, achieving a partial discharge inception voltage of higher than 15 kV RMS, ultra-low coupling capacitance of 1.03 pF, and smaller size than that of the commercial products as well as the state-of-art research prototypes. Experimental results of partial discharge (PD) test, 10 kV SiC MOSFET-based half-bridge test, and 13.8 kV/100 kVA three-phase converter full rating test are conducted for design validation.