This study investigated the thermally induced interdiffusion in ZnCdSe/ZnSe quantum wells and the outdiffusion of Ga atoms from the GaAs substrate by photoluminescence (PL), secondary ion mass spectrometry (SIMS), and contactless electroreflectance (CER) spectroscopy. The quantum well structures grown by molecular beam epitaxy were thermally annealed at temperatures between 250 and 700 °C. According to our results, the 15 K PL main peak disappeared when the annealing temperature reached 550 °C and above for samples grown with a 0.1 μm ZnSe buffer (sample A). In contrast, the PL main peak disappeared when the annealing temperature reached 600 °C and above for samples grown with 0.85 μm ZnSe buffer (sample C). In addition, for sample A, two extra PL peaks around 2.0 and 2.3 eV were observed when the annealing temperature reached 500 °C and above; those peaks were observed only when the annealing temperature reached 700 °C for sample C. SIMS results indicated the interdiffusion of Cd in the ZnCdSe/ZnSe quantum well regions in both samples. However, only sample A revealed a strong outdiffusion of Ga atoms from the substrate into the epilayer side, but a weaker one in sample C. The main peaks in PL spectra and the intersubband transitions in CER spectra disappeared owing to the Cd interdiffusion in the wells and the defect-related transitions introduced by the Ga outdiffusion onto the epilayer side. Based on the SIMS, PL, and CER spectra results, a thicker ZnSe buffer layer can increase the thermal stability of ZnCdSe/ZnSe quantum wells grown on GaAs substrates because of its effectiveness in mitigating the outdiffusion of Ga atoms into buffer layers and the interdiffusion of quantum well regions.
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