By integrating χ(2) optical frequency conversion and χ(3) stimulated Raman scattering (SRS) technology, we demonstrated a new, to the best of our knowledge, deep-UV laser generation scheme near 200 nm in a non-cryogenic KD2PO4 (DKDP) crystal. Based on an Nd:YAG laser (1064 nm, ω1) and cascaded LiB3O5 and DKDP crystals, a 266 nm radiation was obtained firstly by the second- and fourth-harmonic generation (SHG and FHG) (ω4). The energy conversion efficiency from ω1 to ω4 was 24.8%. Meanwhile, the Stokes lights (ω R ) were stimulated by the Nd:YAG laser in a KGd(WO4)2 crystal with two polarization-dependent Raman shifts of 768 cm−1 and 901 cm−1. Finally, 3.5 mJ, 216.3 nm, and 3.1 mJ, 217 nm deep-UV laser sources were obtained in a DKDP crystal by the sum-frequency generation (SFG) of ω R and ω4. The total conversion efficiency from 1064 nm infrared to ∼200 nm deep UV was ∼3%. This scheme, by systematically combining the χ(2) and χ(3) nonlinear effects, overcame the phase-matching limitation of traditional schemes to acquire high-energy 200 nm wave band deep UV via the fifth-harmonic generation (FiHG) in the DKDP crystal, which may provide a new way for the deep-UV laser generation with high energy and high-peak power.
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