This paper evaluates the temperature-dependent static and switching characteristics of SiC Trench mosfet s in a low-inductance multiple-chip power module. First, a phase-leg power module package design with integrated decoupling capacitance is proposed and fabricated based on the P-cell/N-cell concept, and the module design including the substrate layout and packaging material selection are discussed. With the fabricated power module, the temperature-dependent static and switching characteristics of the SiC Trench mosfet s are comprehensively investigated, and the key performance differences from the traditional SiC planar mosfet s are discussed. Specifically, compared to the SiC mosfet s with planar structure, the SiC Trench mosfet s are observed to have a different temperature coefficient in term of the turn- off switching loss. Detailed analysis is provided as well to explain the experimental results.
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