CrAl(Si)N coatings were deposited on Ti-48Al-2Cr-2Nb alloy by arc ion plating. Long-term cyclic oxidation behaviors of the CrAl(Si)N-coated alloy were investigated at 950 °C. The oxidation resistance of the Cr0.4Al0.5Si0.1N coating was significantly better than that of the Cr0.5Al0.5N coating. The addition of Si to the CrAlN coating promoted the formation of an almost continuous inner Al2O3 layer in the oxide scale. The continuous and dense Cr2O3/Al2O3 oxide layer acted as a diffusion barrier and retarded the inward diffusion of oxygen and outward diffusion of the coating elements. However, interdiffusion between the CrAl(Si)N coatings and the alloy was serious and a thick interdiffusion zone formed.