The influence of fabrication processes on the LIBS (Laser Induced Breakdown Spectroscopy) spectra of major and minor chemical constituents in CuIn1-xGaxSe2 (CIGS) absorber films produced by co-sputtering and co-evaporation techniques on Mo-coated soda lime glass (SLG) is reported. It was found that the ablation rate per pulse of CIGS layers fabricated by the co-sputtering technique is higher than those fabricated by the co-evaporation technique, resulting in higher LIBS signal intensities of the constituent elements. The examination of surface morphology of irradiated surfaces and changes in LIBS signal intensities revealed evidences of elemental fractionation for the CIGS films fabricated by co-sputtering technique but not for those by co-evaporation technique. From x-ray diffraction measurements, it was confirmed that the differences in the ablation and spectroscopic characteristics of the two different types of CIGS absorber films were contributed to the differences in crystalline properties. Furthermore, it was demonstrated that LIBS can effectively determine a depth profile of sodium concentration in CIGS thin films, diffused from SLG.
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