Benefited from the high-power impulse magnetron sputtering (HiPIMS) method with small targets (most of them in 2–4 in.) in labs, many published works reported that excellent anti-corrosion and interface conductivity CrN films were obtained in a wide processing window, which is favor in the coating industry. However, a paramount concern is whether this technology could achieve industrial mass production in large vacuum coating equipment with high loading capacity. To assure this, in the present work, a series of CrN films were prepared under different sputtering currents of Cr target by HiPIMS using Cr cylindrical targets with height and diameter of 675 mm and 100 mm, respectively. The effects of sputtering current on the electrical conductivity, corrosion resistance and mechanical properties were investigated. However, often stated as fact that the wide process window in labs turns narrow under industrial scale depending on HiPIMS. Only that the CrN film deposited at the Cr target current of 500 A showing best anti-corrosion and interface conductivity. Our results show that beautiful data obtained under lab scale cannot directly be generalized under industrial scale, which should be carried out in a more serious light.
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