The effect of the space correlation of oxide charges on the effective mobility of electrons in the channel of an NMOS transistor has been studied. Mobility has been obtained by a single-electron Monte Carlo simulation in which space correlation has been included simultaneously with other effects such as screening of point charges by mobile carriers, image charges, and phonon and surface-roughness scattering. Results have been obtained by assuming different degrees of space correlation for several temperature values and diverse oxide-charge concentrations and positions. The charged-centre space correlation is shown to have a noticeable effect on the electron mobility.
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