Hierarchical fluoride-containing zeolite HY (Hie-HY(F)) is an interesting material because it tunes both a high mesoporosity and a moderate acid property, which could benefit the transformation of xylose to xylitol. Herein, we synthesized a new Hie-HY(F) by etching NH4Y with ammonium fluoride (NH4F) under ultrasonication at 60 °C for 20, 40, and 60 min. After etching with NH4F solution, the Hie-HY(F)s contained fluoride in the zeolite frameworks with high mesoporosity and moderate acid properties. The sonication time longer than 20 min caused the structure to collapse rather than the creation of mesoporosity. The Hie-HY(F)s were further used as supports for the Ru catalyst. When loaded with Ru precursor and calcined in air, RuO2 phase was formed in all catalysts. The RuO2 supported on Hie-HY(F)s had a lower reduction temperature than that on HY. Ru supported on Hie-HY(F)-20 gave the reactivity of xylose conversion to xylitol, the highest yield of 80.1 %, providing the reusability up to four cycles.