AbstractElectrically driven soft pumps act as ideal “hearts” for flexible fluidic systems in soft robots and wearable devices. Dielectric elastomers (DEs) are promising for soft pump fabrication owing to their features of fast response, large strain, high energy density, and low power consumption. However, conventional dielectric elastomer actuators (DEAs) using single DE material usually exhibit poor pumping performance due to electromechanical instability or insulating problems. Herein, a multilayer structured heterogeneous dielectric elastomer actuator (H‐DEA) is fabricated based on thin films of processable, high‐performance dielectric elastomer (PHDE) and silicones, and is integrated onto silicone pump body to build a fully soft pump. The pump achieves a flow rate of 3.25 mL min−1 and a blocked pressure of 2.75 kPa with a mass of less than 1 g and a power consumption of 0.21 W. It maintains pumping functions when being bent or stretched and after twisted. It works for viscous liquids and is demonstrated to drive a soft robotic fluidic circuit.