The silicon dioxide (i.e. quartz) has been finely viewed as one of the exceedingly claimed contemporary ceramics which is getting broad engineering applications owing to its superior and excellent properties. Though, its effective and productive processing is still unanswered. This study has been intended to study the consequence of numerous input factors, i.e.; feed rate, tool rotation, ultrasonic power, and coolant pressure on the measures of hole quality (chipping thickness, and surface roughness) experimentally, in rotary type ultrasonic drilling of silicon dioxide. The experiments have been schemed out by employing response surface methodology. The evaluation and analysis of the microstructure of processed samples have also been attempted. This testing has revealed the existence of dominated brittle type of fracture along with the slighter plastic flow that takes away the material from the work. The fitness and consistency of the built-up mathematical model have also been developed with the trial runs. The optimization of measured multiple responses has been carried by using desirability based approach, and at optimized variable values, the superior test run values for chipping thickness, and surface roughness have been observed.