One advantage of a femtosecond laser is that it enables the processing of materials that are otherwise difficult to process via conventional methods such as cutting, grinding, electric discharge machining, etc. However, it is difficult to predict a three dimensional shape processed by the laser. To achieve required three-dimensional shapes using femtosecond lasers with high accuracy and efficiency, it is essential to develop a computer-aided manufacturing (CAM) system that generates processing data (NC data). In this paper, a simulation method is proposed for femtosecond laser processing, which is the basis for the development of a CAM system. A binderless nano-polycrystalline diamond is used as the workpiece material to test the proposed method. Based on a comparison with the experimental results, it is confirmed that the processing shape could be simulated at a high accuracy for fixed-point irradiation as well as scanning irradiation.
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