An accelerometer based on the electrostatic pull-in time of a microstructure is presented in this paper. The device uses a parallel-plate overdamped microstructure, and real-time control operation is performed using a field programmable gate array and high precision digital-to-analog converters. Both open-loop and closed-loop measurements are presented. The low noise is a key feature of this approach, which is limited only by the mechanical–thermal noise of the microstructure used, 2 $\mu \text{g}/\surd $ Hz as shown in the open-loop results (3 $\mu \text{g}/\surd $ Hz in closed-loop operation). The time readout method has extremely high-resolution capabilities. The pull-in time sensitivity can be adjusted up to 1.6 $\mu \text{s}/\mu \text{g}$ , and the electrostatic feedback voltage sensitivity is 61.3 $\text{V}^{2}$ /g. The closed-loop control allows operation of the accelerometer in a much larger range than in open-loop (±500 mg have been achieved) and the linearity is greatly improved ( $\mu \text{g}$ has been measured over 45 h in open loop and 250 $\mu \text{g}$ in closed loop. [2015-0074]