The integrated circuit (IC) is a subject for which researchers need practical experience, but its experiment cost is high, the risk involved is high, and it is not easy to carry out experiments on a large scale. This paper designs a three-dimensional integrated circuit virtual experiment platform based on Unity3d. The platform uses the Unity3d and 3ds Max tools to build a three-dimensional model of instruments, equipment, electronic components, and ultra cleanroom laboratory scenes in an integrated circuit experiment. In addition, it uses C# script to develop the functions and three-dimensional simulation of general virtual instruments and equipment and deploys the experimental website using the frame of the jspxcms open source website. The experimental platform arranges the three-dimensional web file WebGL file in the cloud. Students can use video and text materials to acquire basic IC knowledge at any time and conduct IC virtual experiments safely, efficiently, and without constraints. At present, the platform has been tested and used in teaching and has received high praise and recognition from students.
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