We proposed a new setup for generating outer ring-shaped radio frequency (RF) magnetized plasma near the chamber wall using monopole magnet setups. Three monopole magnet setups with (a) R = 5 mm, (b) R = 20 mm, and (c) R = 35 mm were investigated, where R is the gap between the magnets in consecutive circles. The distributions of the two dimensional magnetic flux lines, the absolute value of the horizontal magnetic flux density, and the discharge voltage were investigated for the proposed setups to produce outer ring-shaped plasma. A highly luminous ring-shaped plasma was observed for the setup (a), whereas multi-ring discharges were observed for the setups (b) and (c). It was found that the electron temperature decreases with increasing gas pressure for all cases. The electron temperatures were 2.42, 1.71, and 1.15 eV at an Ar gas pressure of 4 Pa for setups (a), (b), and (c), respectively. The plasma density was approximately the same for setups (b) and (c) at all gas pressures. The highest plasma densities were 6.26 × 1015, 1.06 × 1016, and 1.11 × 1016 m−3 at 5 Pa for setups (a), (b), and (c), respectively. It was found that the electron mean free path was 41.4, 63.17, and 84.66 mm at an Ar gas pressure of 5 Pa for setups (a), (b), and (c), respectively. The electron neutral collision frequency for setup (a) was higher than those for setups (b) and (c) at a constant RF power of 40 W and an axial distance of z = 13 mm from the target surface. The radial profile of the ion saturation current for setup (b) was more uniform than those for setups (a) and (c).
Read full abstract