๋ณธ ๋
ผ๋ฌธ์์๋ MEMS(Micro Electro Mechanical System) ๊ฐ์๋์ผ์๋ฅผ ์ํ CMOS readout ํ๋ก๋ฅผ ์ค๊ณํ์๋ค. ์ค๊ณ๋ CMOS readout ํ๋ก๋ MEMS ๊ฐ์๋ ์ผ์, ์ปคํจ์ํด์ค-์ ์ ๋ณํ๊ธฐ(CVC), ๊ทธ๋ฆฌ๊ณ 2์ฐจ ์ค์์น๋ ์ปคํจ์ํฐ <TEX>${\Sigma}{\Delta}$</TEX> ๋ณ์กฐ๊ธฐ๋ก ๊ตฌ์ฑ๋๋ค. ์ด๋ค ํ๋ก์๋ ์ ์ฃผํ ์ก์๊ณผ ์คํ์
์ ๊ฐ์์ํค๊ธฐ ์ํ correlated-double-sampling(CDS)์ chopper-stabilization(CHS) ๊ธฐ๋ฒ์ด ์ ์ฉ๋์๋ค. ์ค๊ณ ๊ฒฐ๊ณผ CVC๋ 150mV/g์ ๋ฏผ๊ฐ๋์ 0.15%์ ๋น์ ํ์ฑ์ ๊ฐ๋๋ค. ์ค๊ณ๋ <TEX>${\Sigma}{\Delta}$</TEX> ๋ณ์กฐ๊ธฐ๋ ์
๋ ฅ์ ์ ์งํญ์ด 100mV๊ฐ ์ฆ๊ฐํ ๋, ์ถ๋ ฅ์ ๋ํฐ ์ธ์ดํด์ 10%์ฉ ์ฆ๊ฐํ๋ฉฐ, 0.45%์ ๋น์ ํ์ฑ์ ๊ฐ๋๋ค. ์ ์ฒด ํ๋ก์ ๋ฏผ๊ฐ๋๋ 150mV/g์ด๋ฉฐ, ์ ๋ ฅ์๋ชจ๋ 5.6mW์ด๋ค. ์ ์๋ ํ๋ก๋ CMOS 0.35um ๊ณต์ ์ ์ด์ฉํ์ฌ ์ค๊ณํ์๊ณ , ๊ณต๊ธ ์ ์์ 3.3V์ด๋ฉฐ, ๋์ ์ฃผํ์๋ 2MHz์ด๋ค. ์ค๊ณ๋ ์นฉ์ ํฌ๊ธฐ๋ PAD๋ฅผ ํฌํจํ์ฌ <TEX>$0.96mm{\times}0.85mm$</TEX>์ด๋ค. This paper presents a CMOS readout circuit for MEMS(Micro Electro Mechanical System) acceleration sensors. It consists of a MEMS accelerometer, a capacitance to voltage converter(CVC) and a second-order switched-capacitor <TEX>${\Sigma}{\Delta}$</TEX> modulator. Correlated-double-sampling(CDS) and chopper-stabilization(CHS) techniques are used in the CVC and <TEX>${\Sigma}{\Delta}$</TEX> modulator to reduce the low-frequency noise and DC offset. The sensitivity of the designed CVC is 150mV/g and its non-linearity is 0.15%. The duty cycle of the designed <TEX>${\Sigma}{\Delta}$</TEX> modulator output increases about 10% when the input voltage amplitude increases by 100mV, and the modulator's non-linearity is 0.45%. The total sensitivity is 150mV/g and the power consumption is 5.6mW. The proposed circuit is designed in a 0.35um CMOS process with a supply voltage of 3.3V and a operating frequency of 2MHz. The size of the designed chip including PADs is <TEX>$0.96mm{\times}0.85mm$</TEX>.
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