One of the challenges in nucleation and growth of small atomic aggregates is to develop the novel research field of solid-state chemistry and material science using gas-phase-synthesized superatom nanoclusters. Among various superatoms, the greatest advantage of the central-atom-encapsulating binary superatoms, such as M@Si16, is that their electronic structures can be designed by optimizing the central metal atom M while retaining the geometrical symmetry of the Si16 cage [1], as shown in the figure below. We have systematically investigated the nucleation and growth of M@Si16 superatoms with gas-phase mass spectrometry, and then performed the surface immobilization of the M@Si16 cations and anions on a substrate monodispersively with the size-selective soft-landing. Initial products prepared via the surface immobilization of M@Si16 superatoms on solid surfaces decorated with monolayer films of C60 molecules were investigated using scanning tunneling microscopy (STM) [2] and X-ray photoelectron spectroscopy (XPS) [3]. Furthermore, we have developed a large-scale synthesis method for M@Si16 (M = Ti and Ta) by scaling up the clean dry-process with a high-power impulse magnetron sputtering (HiPIMS, nanojima®) [4] and by a direct liquid embedded trapping (DiLET) method [5]. The spectroscopic results reveal that the structures of soft-landed and isolated M@Si16 superatoms are the metal-encapsulating tetrahedral silicon-cage (METS) [5,6].Furthermore, superatoms of group-5 metals (M = V, Nb, and Ta) encapsulating Si16 cage nanoclusters (M@Si16) can be efficiently generated to form assembled films [7]. Temperature-dependent current–voltage (I–V) characteristics of the M@Si16 assembled films revealed that the electrical conduction mechanism is not band transport, but hopping transport with Efros–Shklovskii variable range hopping for all central M atoms [8]. The results show that electrons involved in conduction are strongly correlated to localized electronic states.[1] K. Koyasu, A. Nakajima, et al. J. Am. Chem. Soc. 127, 4998 (2005).[2] M. Nakaya, A. Nakajima, et al. Nanoscale, 6, 14702 (2014).[3] M. Shibuta, A. Nakajima, et al. J. Am. Chem. Soc. 137, 14015 (2015).[4] C. H. Zhang, A. Nakajima, et al. J. Phys. Chem. A 117, 10211 (2013).[5] H. Tsunoyama, A. Nakajima, et al. J. Phys. Chem. C 121, 20507 (2017).[6] H. Tsunoyama, A. Nakajima, et al. Acc. Chem. Res. 51, 1735 (2018).[7] M. Shibuta, A. Nakajima, et al. J. Phys. Chem. C, 124, 28108 (2020).[8] T. Yokoyama, A. Nakajima, et al. J. Phys. Chem. C, 125, 18420 (2021). Figure 1