The theoretically high mobility of graphene on C-terminated face of silicon carbide (SiC (000-1)) makes it a suitable candidate for electronic devices. However, the quality of graphene grown on SiC (000-1) is always poor. In this paper, we clarify that the partial pressure of silicon is the core parameter to control the nucleation and growth of graphene on SiC (000-1). Therefore, we propose a new system with SiC cap and optimize the height between the SiC cap and the SiC sample to control the partial pressure of silicon. Finally, the high-quality graphene with almost no D peak in Raman spectrum has been obtained. The nanosized domain underlying the top graphene layer has been demonstrated as the source of the defects, which can be inhibited by high partial pressure of silicon. Herein, a special electronic detective mode of electrically biased tapping mode (eb-TM) has been successfully implemented to characterize of the nano-domains underside. Furthermore, in our system, the suitable temperature is from 1350 °C to 1500 °C and the pressure is from 750 Pa to 40 kPa. This broad growth window makes the SiC cap system has greater advantages in the large-scale and stable batch production of epitaxial graphene in the future.