Nucleate pool boiling experiments for R11 under a constant wall temperature condition were carried out. A microscale heater array was used for the heating and the measurement of high temporal and spatial resolution by the Wheatstone bridge circuit. Very sensitive heat flow rate data were obtained by the control for the surface condition with high time resolution. The measured heat flow rate shows a discernable peak at the initial growth stage and reaches an almost constant value. In the thermal growth region, bubble shows a growth proportional to . The bubble growth behavior is analyzed with a dimensionless parameter to compare with the previous results in the same scale. As the wall superheat increases, the departure diameter and the departure time increase, and the waiting time decreases. But the asymptotic growth rate is not affected by the wall superheat change. The effect of the wall superheat is resolved into the suggested growth equation. Dimensionless parameters of time and bubble radius characterize the thermal growth behavior well, irrespective of wall condition. The comparison between the result of this study and the previous results shows a good agreement at the thermal growth region. The quantitative analysis for the heat transfer mechanism is conducted with the measured heat flow rate behavior and the bubble growth behavior. The required heat flow rate for the volume change of the observed bubble is about twice as much as the instantaneous heat flow rate supplied from the wall.