Graphical abstractDisplay Omitted We investigate the origin of Zr substitution in BiFeO3 films.The depth profile of XPS analysis is performed.Conduction mechanisms at gate metal/Zr-doped BFO and Zr-doped BFO/Si interfaces are investigated.The theoretical and experimental memory windows have been discussed. Metal-ferroelectric (Zr-doped BiFeO3)-insulator (HfO2)-semiconductor (MFIS) structures have been fabricated by magnetron cosputtering technique. The C-V memory windows of MFIS capacitors as functions of insulator film thickness, DC power for Zr, post-annealing temperature were compared. The leakage current that reduces with increasing the DC power results in larger memory window. The memory window increases with increasing HfO2 insulator thickness due to the effect of charge injection. In addition, the memory window increases with increasing DC power for Zr. A maximum memory window of 1.6V is obtained at the swept voltage of 8V. The temperature-dependent conduction currents of MFIS capacitors with Zr-doped BFO thin films were studied.