A 300-GHz-band transmission-type multilayer metasurface beamformer based on a Jerusalem cross geometry is presented. A metamaterial cell with a continuous 2π phase variation for the radius change was designed and used in the fabrication of a reference device and three types of beamforming devices. The beamforming metasurface devices achieved steering angles of θ = 18°, θ = 30°, and θ = 38°, which were in good agreement with simulated results. A broadband operation in a 40 GHz band, from 280 GHz to 320 GHz was evaluated, showing only minor frequency dependence of the beamforming angles. The design and fabrication methodology can be applied to various types of metasurface devices, such as circular and fan lenses, beamformers, polarization switches, and so on for millimeter-wave frequency bands that are considered to be used in future 6 G wireless network systems.
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