Today, microelectromechanical system (MEMS) technology plays an important role in human daily life. One of the main items in MEMS design is the use of a small battery with a long life. In this work, the 90Sr radioisotope with a half-life of 28.8 years and an activity of 16.328 mCi was considered as a radioactive source. First, the 90Sr cylindrical source was designed with a gold substrate and antimony side surface coating. Then, the optimum radius and thickness of the source were investigated. Next, the optimized 90Sr cylindrical source was considered as the direct charge nuclear battery source. In the next step, the effect of collector coating on collector efficiency was investigated. Then, different positions were considered for collector placement, substrate and side surface coating and the best mode was selected. The purpose is to determine the smallest size possible for a direct charge nuclear battery with the maximum amount of short circuit current. Finally, by comparing the results of simulations performed with Monte Carlo N–Particule Transport (MCNPX) code, the present work concluded that the best parameters for direct charge nuclear battery are the use of beryllium and the 90Sr radioisotope as collector coating and source, respectively, source thickness of 0.01 µm, source radius of 37.5 µm, collector thickness 0.01 µm and collector distance from source about 3.75 µm. Under these parameters, the short circuit current is 0.092 fA. In this case, the designed direct charge nuclear battery has the highest short circuit current and the smallest dimension possible. If the dimensions of the optimized nuclear battery are 100 times, i.e., the thickness of the source increases from 0.01 to 1 µm and the radius of the source increases from 37.5 to 3750 µm, only about 2.92% of the source efficiency decreases, but the activity is 106 times more. In other words, the activity increases from 0.016328 µCi to 16.328 mCi; therefore, the short circuit current of this direct charge nuclear battery reached 0.078 nA, which is suitable for use in MEMS. Also, the collector height of this battery is 1960 µm, its radius is 3850 µm, and its thickness 1 µm.
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