Chemical vapor deposition (CVD)-grown and Pt nanoparticles (NPs) decorated multilayer WS2 is treated by ultraviolet (UV) ozone for the modification of the surface roughness to realize the enhanced hot carriers injection via the internal photoemission (IPE). The morphology, structure and photophysical properties as well as the dependence of the photoresponse on the UV ozone treatment are investigated. The UV ozone treatment demonstrates obvious effect on the WS2 surface roughness (Sa), which reaches the maximum around 14 nm after 2 min exposure and subsequently decrease with the extension of treatment duration. UV ozone treatment also leads to obviously diminished photoluminescence (PL) and shortened excitons lifetime for bare WS2 while its influence on the electronic structure is negligible. The diminished PL, shortened PL decaying lifetime and increased Sa are all originated from the formation of WOx due to the consumption of top WS2 layer by the severe oxidation, and such effects will be greatly alleviated when the fresh and undisturbed underlying WS2 layer appears with the treatment duration extended to 4 min. The 2 min UV ozone treated WS2/Pt exhibits optimal wide spectrum photoresponse (400–900 nm) with the near infrared (NIR) responsivity around 18 A/W at 750 nm, about 60 % higher compared to that of untreated one while the 4 min overtreated WS2/Pt demonstrates much deteriorated photoresponse. Such behavior can be ascribed to the enhanced hot electrons injection from Pt to WS2 due to the formation of rough Schottky contact as well as the separation of photo-excited electron-hole pairs by Schottky junction. Our study proves that the Sa is a key factor not only for the exciton dynamics but also for the hot electron injection from Pt to WS2.
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