Semiconducting carbon nanotubes (s-CNTs) are promising channel materials for both high-performance ultra-scaled field-effect transistors (FETs) and thin film transistors (TFTs) due to their excellent electronic properties. Many research groups have demonstrated the application of s-CNTs in either logical computing circuits or large area electronics. However, before the CNT-based electronics technology takes real impact, many challenges should be overcome, such as achieving high purity of s-CNTs, reliable methods for their deposition and alignment, development of scalable and cost-effective production techniques, and corresponding quality characterization metrology. In this presentation, we will report our progress on the s-CNT materials and their application for FETs and TFTs.Conjugated polymer wrapping method was used to extract s-CNTs from the raw CNT materials. We have developed a closed-loop recycling strategy, in which raw materials (CNTs and polymers) and solvents were all recycled and reused for multiple separation cycles, thus high-purity (99.9999%) and high structural quality s-CNTs were mass produced. The cost was reduced to ~ 1% in comparison with commercially available products, and total yield was increased to 36% in comparison with 2%–5% of usual separation methods.Highly unform and density-controllable thin films of random-oriented CNTs (R-CNTs) were fabricated by a dip-coating method on 4-inch/8-inch Si wafers and 2.5th generation (G2.5) backplane glasses (370 mm × 470 mm). Ultra-clean wafer-scale aligned s-CNTs (A-CNTs) were fabricated by a modified dimension-limited self-alignment (m-DLSA) method. To quantify the overall quality of both R-CNT and A-CNT films, we proposed a four-parameter metrology which includes the local tube density (DL), global density uniformity (Cv), local degree of order (OL), and the relative tube proportion in a certain orientation (Pθ) at a location. The four-parameter metrology is not only powerful for overall quality evaluation of CNT films, but also able to predict the performance fluctuation of fabricated devices.TFTs fabricated using the R-CNTs show mobility of 45-55 cm2/Vs with a high-performance uniformity (Cv ≈ 11%–13%) on a 4-inch wafer. A micro-LED display with 32×32 pixels were driven successfully by 2T1C AMTFT back plane based on R-CNT TFTs. Top-gated FETs based on A-CNTs exhibit excellent electronic performance with an on-state current (Ion) of 2.2 mA/μm, peak transconductance (gm) of 1.1 mS/μm, low contact resistance (Rc) of 191 Ω•μm and negligible hysteresis, among the best reported performance of CNT FETs. We believe our progress in the s-CNT materials will greatly push the CNT-based electronics technology into practical applications.
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