International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 467-470 (2003) Testing and CharacterisationNo AccessSTATIC AND DYNAMIC CHARACTERIZATION OF MEMS VIA ESPIAndreas H. Foitzik, Wolfgang Kaese, Thomas Vogt, Michael Sommerer, and Serguei ArkhipovAndreas H. FoitzikUniversity of Applied Sciences Esslingen, Department for Mechatronics, Robert-Bosch-Str. 1, D-73037 Goeppingen, Germany Search for more papers by this author , Wolfgang KaeseUniversity of Applied Sciences Esslingen, Department for Mechatronics, Robert-Bosch-Str. 1, D-73037 Goeppingen, Germany Search for more papers by this author , Thomas VogtUniversity of Applied Sciences Esslingen, Department for Automotive Technology, Esslingen, Germany Search for more papers by this author , Michael SommererUniversity of Applied Sciences Esslingen, Department for Automotive Technology, Esslingen, Germany Search for more papers by this author , and Serguei ArkhipovMOSCOW AVIATION INSTITUTE (MAI), MOSCOW, Russia Search for more papers by this author https://doi.org/10.1142/S1465876303001538Cited by:2 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractGenerally unaltered surfaces stemming from IC- or MEMS-production (Micro Electro Mechanical Systems) cannot be investigated with ESPI (Electronic Speckle Pattern Interferometry) due to the lack of any interference from the extremely flat surfaces of devices made of silicon. In order to enable ESPI for such devices additional "rough" layers can be added to the MEMS surfaces, while these relatively "thick" layers alter the mechanical properties of such small devices considerably. Utilizing a new surface preparation technique (Goeppingen Procedure®) allows to create a nm-sized roughness onto the surfaces of MEMS, thus enabling interference originating from such altered surfaces and subsequently allowing ESPI.Static ESPI on commercially available micro-sized tilt-sensors as well as read-write head of a hard disk drive showed that elastic deformations can be determined with a lateral accuracy in the μm-range and an axial accuracy in the nm-range, respectively. The static investigations allowed the identification of defect sensors in terms of quality assurance. Dynamic ESPI on MEMS showed different normal modes as well as the dynamic behaviour at the occurence of the first and the second harmonic.Keywords:MEMSESPI - Electronic Speckle Pattern InterferometryGoeppingen Procedure References J. A. Leendertz, J. Phys. E (Sci. Instrum.) 3, 214 (1970). Crossref, Google Scholar H. Marwitz , Praxis Holographie ( Expert-Verlag , 1990 ) . Google ScholarP. Aswendt and R. Höfling, Measurement 23, S. 205 (1998). Crossref, Google ScholarD. Holsteinet al., Composite Structures 40, S. 257 (1998). Crossref, Google Scholar K. Hariri , Bruchmechanisches Verhalten jungen Betons: Laser-Speckle-Interferometrie und Modellierung der Rißprozeßzone ( Techn. Univ. Braunschweig , 2000 ) . Google ScholarZ. Yanget al., Optics and Lasers in Engineering 28(6), 443 (1997). Google Scholar Höfling, R.; Aswendt, P.; Liebig, V.; Brückner, H.: Synthesis of experiment and simulation in speckle interferometry: a medical application; Akademie Verlag Series in Optical Metrology, Vol. 2, S. 261-268, Berlin 1996 . Google Scholar Foitzik, A.H.; Kümmel, M.; Schmid, M.; Kaese, W.; Vogt, T.; Groth, P.; "ESPI on MEMS", 13.Intern. Wissenschaftlich-technische Konferenz SENSOR 2001, Sudak/Krim 2001 . Google Scholar FiguresReferencesRelatedDetailsCited By 2An Experimental Study of the Vibrational Characteristics of a Diamond Circular Blade Using Electronic Speckle-Pattern Interferometry and FEMMykhaylo Tkach, Yurii Halynkin, Arkadii Proskurin, Irina Zhuk and Volodymyr Kluchnyk et al.15 May 2021 | Acta Mechanica et Automatica, Vol. 15, No. 1Electronic Speckle Pattern Interferometry for Vibrational Analysis of Cutting ToolsPiotr Mrozek, Ewa Mrozek and Andrzej Werner17 July 2018 | Acta Mechanica et Automatica, Vol. 12, No. 2 Recommended Vol. 04, No. 03 Metrics History KeywordsMEMSESPI - Electronic Speckle Pattern InterferometryGoeppingen ProcedurePDF download
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