The formation of self-assembled InAs and InAs x P 1− x dots on InP has been studied, in particular with deposition conditions under which mainly coherent dots are developed. The samples were grown by metalorganic vapour phase epitaxy. Morphological investigations were performed by atomic force microscopy, with the instrument working in the contact mode as well as in the noncontact mode. Surface densities and height distributions were extracted, as a function of growth conditions. In addition, photoluminescence was used for investigations of the optical properties of capped InAs dots, formed under equivalent conditions. Comparisons between the two characterization techniques show a qualitative agreement with respect to the density of dots as well as their size homogeneity. It is also indicated that dots of binary InAs can be formed at deposition temperatures not higher than about 500°C. Elevated deposition temperatures in this process result in an unintentional alloying mechanism due to exchange reactions at the interface, leading to the formation of ternary InAs x P 1− x dots, which can be seen as a simultaneous increase in the energy of the light emission and the average dot size, indicating the widening of the energy gap in the quantum dots, which counteracts the decreased energy quantization in the larger dots formed at higher temperatures.
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