High performance UVC (220 nm–280 nm) detectors with low work voltage is key problem in wide application of UVC optoelectronic device. Here, Au/MgZnO/Ga-doped ZnO/In heterojunction detector is made with both high UVC sensitivity mix-phase MgZnO and high carrier density Ga-doped ZnO conductive layers. The heterostructure detector possess relative high response(0.36A/W)at 254 nm deep UV light without bias voltage. The avalanche breakdown phenomenon within the heterojunction detector, introduced high deep UV response (1390.3 A/W at 3.3 μW/cm2 230 nm) of the Au/MgZnO/Ga-doped ZnO/In heterojunction detector under 5 V bias voltage. The high response of Au/MgZnO/Ga-doped ZnO/In heterojunction detector under low work voltage, is not only much higher than MSM structure MgZnO detector under bias voltage over 25 V, but also higher than reported deep UV detector under small bias voltage. In addition, because of different internal breakdown mechanism, the peak response position of the Au/MgZnO/Ga-doped ZnO/In heterojunction detector is located at shorter wavelength position compared with MSM structure MgZnO detector. Therefore, Au/MgZnO/Ga-doped ZnO/In heterojunction detector is an ideal device structure in low voltage driven detector with relative high response at short wavelength UV light.
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