The dynamics and the morphology of the intermetallic phase evolution for isothermal diffusion soldering with the eutectic Au–Sn alloy as the solder material on copper and silver substrates was investigated. The phases involved and the reaction parameters like the rate of the intermetallic layer growth and the activation energy could be determined by in-situ X-ray diffraction. Transmission electron microscopy and energy dispersive X-ray spectroscopy bring further insight into the morphology changes that occur during the process. The results contribute to a better understanding of this advanced joining method extensively used in semiconductor packaging.