Mass spectrometric measurements of a plasma needle (an example of atmospheric pressure non-equilibrium plasma source) were made for neutrals and ions. The measurements were performed for the same geometry as the standard plasma needles albeit for a somewhat increased gas flow. We discuss some of the problems of performing mass analysis at atmospheric pressures.The yields of N, O and NO radicals from the plasma needle were determined for different powers of the RF source and different flow rates of working gas. Positive ions generated by the plasma needle itself were measured for the first time. Significant conversion of feed gases (nitrogen and oxygen) into radicals and ions of N and O, and NO was observed as well as depletion of atomic radicals N and O which in chemical reactions form more complex molecules. Biomedical and nanotechnology applications of atmospheric pressure plasmas require a detailed understanding of the source, and mass analysis is perhaps the best technique to focus on chemical kinetics and in many ways interaction with surfaces.
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