We developed a process for micropiercing a titanium (Ti) sheet to produce a barrier membrane for guided tissue regeneration that uses a roll-to-substrate (RTS) method. We performed an experiment using pure Ti sheets with thicknesses of 5, 10, 15, and 20μm. With the RTS process, the lining film for the perforator of the Ti sheet is very important in ensuring success. We evaluated the optimum thickness of the lining film and the roll speed for the Ti sheet piercing process. At a roll speed of 1m/min, the experimental values of Pmax agreed reasonably well with the calculated values. The aperture ratio was more than 90% for all Ti sheet thicknesses. For a stage speed of 3m/min and load of 1000N, the aperture ratio was more than 90% for only the 5- and 10-μm-thick Ti sheets. A load of 1000N or more was necessary to perforate the 15- and 20-μm-thick Ti sheets. In terms of productivity, approximately 454,000 through-holes per second were formed on 5- and 10-μm-thick Ti sheets with a roll speed of 3m/min.