This work aims to analyze the area underneath the nanoscratch track on micro and nano scale. During a nanoscratch test in the tribological contact, a flattening of the hard coating was observed by using scanning electron microscopy. The motivation for this paper was to contribute to a better understanding of this effect. It was assumed that the applied load as well as simultaneous thermally induced effects during nanoscratch test in short time lead to a melting of low melting phases within the superficial passive layer consisting of oxides. In order to verify this, the near-surface area underneath the nanoscratch track was analyzed by means of high resolution transmission electron microscopy. It is found, that the CrN/AlN loses its nanolaminate architecture in the near-surface area up to a depth of s ≈ 40 nm. Within this area, the crystallinity was significantly changed and amorphous fractions are identified by using fast fourier transformation patterns. Further, the results support the assumption that melting of low melting oxides in the passive layer occurs due to the superimposed mechanical and thermal load during nanoscratch test.