Abstract Tensile creep behavior and changes in the microstructure of the advanced silicon nitride, SN 88M, were studied at temperatures from 1250 to 1400°C to reveal the creep resistance and lifetime-controlling processes. Assuming power law dependence of the minimum strain rate on stress, stress exponents from 6 to 8 and an apparent activation energy of 780 kJ/mol were obtained. Extensive electron microscopy observations revealed significant changes in the crystalline secondary phases and creep damage development. Creep damage was classified in two groups: ‘inter-granular’ defects in the amorphous boundary phases, and ‘intra-granular’ defects in silicon nitride grains. The inter-granular defects involved multigrain junction cavities, two-grain junction cavities, microcracks and cracks. The intra-granular defects included broken large grains, small symmetrical and asymmetrical cavities, and crack-like intragranular cavities. Cavities are generated continuously during the whole deformation starting from the threshold strain of ∼0.1%, and they contribute linearly to the tensile strain. Cavities produce more than 90% of the total tensile strain, and it is concluded that cavitation is the main creep mechanism in silicon nitride ceramics. The multigrain junction cavities are considered to be the most important for generating new volume and producing tensile strain. The Luecke and Wiederhorn (L&W) creep model, based on cavitation at multigrain junctions according to an exponential law, was proven to correspond to the stress dependence of the minimum strain rate. A qualitative model based on the L&W model was suggested and expanded to include intragranular cavitation. The basic mechanisms involve a repeating of the sequence grain boundary sliding (GBS) ⇒ cavitation at multigrain junctions ⇒ viscous flow and dissolution-precipitation. The oxynitride ⇒ disilicate secondary phase transformation also occurs during creep and may result in the reduction of the residual glass content. The suggested creep model considers the effects of phase transformation, oxidation, crystallization, etc. on the basic creep mechanisms due to changes of the properties of the residual glass. Control of the amount and viscosity of the residual glass provides the possibility for the reduction of cavitation and consequently, for more creep-resistant ceramics.