Plasma nitrocarburizing of an austenitic stainless steel AISI 316L was performed in an N2-H2 atmosphere (50 % H2 and 50 % N2) with a carbon-fiber reinforced carbon (CFC) active screen. The experimental concept of a plasma-discharged CFC active screen in conjunction with a substrate holder at floating potential ensures that no charged particles are present on the sample surface and no sputtering occurs. As a result, carbon contaminations are formed on the surface which were studied in detail with a combination of scanning electron microscopy (SEM) and secondary ion mass spectrometry (SIMS). The results indicate that a layer of about 25–50 nm of carbon is formed. At the same time, a strong segregation of Mn, Ni and Cr is observed below the coating within the steel substrate. Both effects progress with treatment time and there exists a clear correlation between the formation of the carbon layer and the segregation effect.
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