Inconel 617 alloy, Incoloy 800H alloy and Hastelloy X alloy are three alternative superalloys for heat transfer tubes used in the steam generator (SG) in the very high temperature gas cooled reactors (VHTR). In this paper, the oxidation kinetics of isothermal oxidation of three superalloys in the circulating air at 950 ℃ during the air ingress accident is investigated. Oxidation kinetic parameters of superalloys, such as the oxidation rate indexes (np and nt), mass parabola rate constant (kp) and oxide layer thickness parabola rate constant (kt) are calculated by the experimental data. In addition, tested samples of superalloys were analyzed by Scanning Electron Microscopy (SEM), Energy-Dispersive X-ray Spectroscopy (EDS) and X-ray diffraction (XRD). The results show that these three superalloys exhibit parabolic oxidation behavior in air atmosphere. The oxidation behavior of Incoloy 800H alloy is closer to the cubic oxidation law as time increases. The mass gain of three alloys does not fully match with the growth law of the oxide layer, which should be attributed to the internal oxidation degree of the alloy. The arithmetic square root of kp and kt, L, are proposed to quantify the internal oxidation degree. And the L of Inconel 617 alloy is the largest compared to Inconel 800H alloy and Hastelloy X alloy. This work is helpful to explain the behavior of oxidation of superalloys.