YBa 2Cu 3O 7− δ (YBCO) films were grown by using precursor films with barium concentration gradient in film thickness by an advanced metal organic deposition process using trifluoroacetates (TFA-MOD). We have reported previously that a lot of non-reacted particles such as Y- and Cu-oxides were remained for the YBCO film surface grown by the precursors using a starting solution with barium-poor (cation ratio as Y:Ba:Cu = 1:1.5:3). Then, the barium concentration was increased in the film surface to complete the reaction among these Y and Cu residues and Ba and to increase the Y123 growth thickness for realizing higher J c performance. Transmission electron microscopy (TEM) observation showed the increase of film thickness of YBCO grown by the precursors with barium concentration gradient in film thickness, indicating that the reaction between these Y and Cu-oxides and Ba proceeded to form Y123 phase. Consequently, higher J c was obtained for the YBCO film by the precursors mentioned above than that of the YBCO film by the precursors with a constant concentration. Effects of barium concentration gradient in the precursors on the superconducting properties and microstructures in the YBCO film were discussed.