Abstract
YBa 2Cu 3O 7− δ (Y123) films were deposited under various water partial pressures ( P H 2O ) in the crystallization process by the advanced metalorganic deposition (MOD) method using trifluoroacetates. Microstructures of the films were evaluated by means of transmission electron microscopy. As a result, in the Y123 film crystallized under lower P H 2O such as 2.1%, large pores were remarkably observed. Furthermore, there were many amorphous layers of a non-superconducting phase in this film. In contrast, small pores were distributed in the films deposited under higher P H 2O . Considering that the critical current ( I C) values become higher as P H 2O increases, existence of large pores and non-superconducting phase crystals causes to reduce I C. Through the investigation of the microstructure of the films quenched during the crystallization process, it was found that the pores in the film are generated by reaction of the non-superconducting phases, which are trapped in the growing Y123 film afterwards, to transform to Y123 with accompanied by the volume reduction of about 30%. The sizes of the entrapped phase crystals in Y123 film depend on the P H 2O and it may determine the pore sizes in the final film.
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