Abstract

YBa 2Cu 3O 7− y (Y123) and Nd 1+ x Ba 2− x Cu 3O 7− y (Nd123) films were deposited by metalorganic deposition (MOD) method, and investigated by transmission electron microscopy and energy dispersive X-ray spectroscopy in order to elucidate the growth mechanism of the films in the MOD process. Y123 and Nd123 films were prepared by cooling rapidly during the final heat-treatment. In the case of the Y123 quenched film, it was found that a polycrystalline film is formed over a c-axis oriented Y123 film, and that there are Y 2Cu 2O 5, BaF 2 and CuO particles in the polycrystalline film. In contrast, in the Nd123 quenched film, (Nd,Ba) 2CuO 4 phase was found to be generated on the surface of the substrate. In conclusion, we suggest that the Nd123 film is formed by a reaction of (Nd,Ba) 2CuO 4, BaF 2 and CuO, although the Y123 film is grown by diffusion and reaction of Y 2Cu 2O 5, BaF 2 and CuO crystals.

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