Actuation Electrodes Research Articles

A Bionic Robotic Fish with a Dielectric Elastomer

Abstract Dielectric elastomer actuators (DEAs) are promising enabling devices that can be used in a wide range of robots, artificial muscles and microfluidics. They are characterized by high actuating strain, low cost and noise, and high energy density and efficiency. There are three main challenges for enabling DEs to become actuators: (1) developing suitable and compatible electrode materials; (2) effectively isolating the actuator electrode from the surrounding fluid; and (3) creating a rigid frame that usually requires prestraining of the dielectric layer. The use of robotic fish in water is an important application field of biomimetic soft robots. At present, most underwater robotic fish use spiral propulsion, which has several problems, including propulsion efficiency, position controllability and aquatic organism involvement. To provide solutions, the research and development of underwater robotic fish that imitate the fins and body propulsion of fish and the use of soft underwater robotic fish are in full adoption. This project involves the research and development of a bionic soft underwater robot fish with a software driver, which can imitate swimming via the tail fin and body of a fish, especially with respect to stable swimming propulsion, to successfully develop high-performance soft underwater robot fish. In addition, to imitate the unstable swimming movements of fish, such as turning and sharp acceleration and deceleration, robot fish that use DE drivers with good flexibility and high strain have been researched and developed.

Boundary Layer Control with a Plasma Actuator Utilizing a Large GND Mesh Electrode and Two HV Electrode Configurations

This article presents the results of experimental studies on the influence of the geometry of high-voltage plasma actuator electrodes on the change in flow in the boundary layer and their influence on the change in the lift coefficient. The plasma actuator used in the described experimental studies has a completely different structure. The experimental model of the plasma actuator uses a large mesh ground electrode and different geometries of the high-voltage electrodes, namely copper solid electrodes and mesh electrodes (the use of mesh electrodes, large GND and HV is a new solution). The plasma actuator was placed directly on the surface of the wing model with the SD 7003 profile. The wing model with the plasma actuator was placed in the wind tunnel. All experimental tests carried out were carried out for various configurations. The DBD plasma actuator was powered by a high-voltage power supply with a voltage range from Vp = 7.5–15 kV. The use of a high-voltage mesh electrode allowed for an increase in the lift coefficient (CL) for the angle of attack α = 5 degrees and the air flow velocity in the range from V = 5 m/s to 20 m/s, while the use of copper electrodes HV with the plasma actuator turned off and on, were very small (close to zero). The experimental studies were conducted for Reynolds numbers in the range of Re = 87,985–351,939.

Fast Identification and Compensation for Actuation Electrode Errors of Rate Integrating Gyroscopes

Fast Identification and Compensation for Actuation Electrode Errors of Rate Integrating Gyroscopes

Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching

In this paper, a novel fabrication process for the realization of large, suspended microfluidic channels is presented. The method is based on Buried Channel Technology and uses a mixture of HF, HNO3, and water etchant, which has high selectivity between the silicon substrate and the silicon-rich silicon nitride mask material. Metal electrodes for actuation and read-out are integrated into the fabrication process. The microfluidic channels are released from the silicon substrate to allow the vibrational movement needed for the application. The resulting microfluidic channels have a near-circular cross-section, with a diameter up to 300 μm and a channel wall thickness of 1.5 μm. The structure of a micro-Coriolis mass-flow and density sensor is fabricated with this process as an example of a possible application.

Пьезоэлектрический дисковый актюатор кручения с дискретно-спиральными электродами

A mathematical model of a disk (ring) torsion actuator with curvilinear interdigital electrodes – «villi» of a spiral form, which are characterized by a constant value of the orientation angle of an arbitrary section of the villus to the circumferential direction of the disk, has been developed. Bases of electrode-villi interacting with each other through local areas of piezoelectric layer are connected with periodic alternation to central or peripheral concentric circular base electrodes, to outputs of which control voltages are connected. As a result of numerical modeling of the «twisting bimorph» graphs of the dependence of the twist angle and the blocking torque on the ratio of the inner and outer radii and the values of the control voltage at the outputs of the base electrodes of the annular two-layer actuator with symmetrical (relative to the radial line) directions of the spiral orientations of the electrode-villi and, as a result, the spiral polarization lines of the piezoelectric layers working for tension/compression.

High‐Performance MXene/Carbon Nanotube Electrochemical Actuators for Biomimetic Soft Robotic Applications

AbstractIonic electrochemical actuators, which convert electrical energy into mechanical energy through electrochemical‐induced ion migration, show great potential in biomimetic soft robots. However, their applications are still limited due to the influence of the electrode materials and actuator performance. Here, an MXene/carbon nanotube (CNT) heterostructural electrode‐based ionic actuator is developed and realizes dexterous touch manipulation mimicking humans. In this MXene/CNT heterostructure, one‐dimensional CNTs are chemically interconnected into layered two‐dimensional MXene nanosheets, increasing their interlayer spacing, promoting mechanical stability, and enhancing specific surface area, which facilitates the ion migration and storage as well as electrochemical actuation. Accordingly, the MXene/CNT actuator can output excellent mechanical deformation under 2.5 V voltage, including large peak‐to‐peak deformation (displacement 24 mm, strain 1.54%), wide frequency response (0.1–15 Hz), large force (5 mN) and good cycling stability. The actuators can be used to construct artificial fingers to achieve gentle, multi‐point, variable frequency, and synergistic touching on fragile smartphone screens, including pressing a phone number to make a call and tapping an electronic drum. Especially, this finger can tap the drum at a high frequency (13 Hz), exceeding the tapping frequency that real human fingers can reach, which demonstrates its prospect in human‐computer interaction.

Factorial experimental design based on multiple factors for sensors and actuators development

Factorial experimental design based on multiple factors for sensors and actuators development

Mechanisms of Characteristic Parameters of Plasma Actuator on Film Cooling and Turbulent Transport Based on Multi-Objective Optimization

In this paper, film cooling effectiveness and pressure loss coefficient are taken as the objective functions to optimize the plasma characteristic parameters such as electrode position, spacing, length and actuation intensity for enhancing film cooling performance. Regression equations of two objective functions are accessed by the Response Surface Method, and Non-Dominated Sorting Genetic Algorithm is applied for bi-objective optimization. Two sets of Pareto optimal solutions are available via the Technique for Order Preference by Similarity to an Ideal Solution decision method. Pareto optimal solutions are calculated by Detached Eddy Simulation to clarify the turbulent transport and heat transfer characteristics induced by the plasma. Wall-averaged cooling effectiveness and pressure loss coefficient without plasma power supply are 64.3% and 3.9% superior to that without electrode, respectively. The plasma fragments the hairpin vortex into a striped structure and induces a large scale streamwise vortex behind the bare electrode. The plasma weakens the velocity diffusion and turbulent heat transport in the ionization zone. Overlapping electrodes render the root-mean-square pulsation velocity and Reynolds stress of the optimal model 1 both less than those of the optimal model 2 without overlapping electrodes, and flow field disorder is decreased. Electrode position interferes with the action location of plasma on cooling jet. Actuation intensity affects the ionization intensity and has a maximum value of 8.88 to optimize the actuator performance. Compared with no plasma actuation, wall-averaged cooling effectiveness of optimal model 1 and optimal model 2 are enhanced by 30.7% and 21.8%, and pressure loss coefficient are declined by 7.7% and 7.1%, respectively.

In silico optimization of aligned fiber electrodes for dielectric elastomer actuators

Dielectric elastomer actuators (DEAs) exhibit fast actuation and high efficiencies, enabling applications in optics, wearable haptics, and insect-scale robotics. However, the non-uniformity and high sheet resistance of traditional soft electrodes based on nanomaterials limit the performance and operating frequency of the devices. In this work, we computationally investigate electrodes composed of arrays of stiff fiber electrodes. Aligning the fibers along one direction creates an electrode layer that exhibits zero stiffness in one direction and is predicted to possess high and uniform sheet resistance. A comprehensive parameter study of the fiber density and dielectric thickness reveals that the fiber density primary determines the electric field localization while the dielectric thickness primarily determines the unit cell stiffness. These trends identify an optimal condition for the actuation performance of the aligned electrode DEAs. This work demonstrates that deterministically designed electrodes composed of stiff materials could provide a new paradigm with the potential to surpass the performance of traditional soft planar electrodes.

Self-standing bacterial cellulose-reinforced poly(3,4-ethylenedioxythiophene)/poly(4-styrenesulfonate) doped with graphene oxide composite electrodes for high-performance ionic electroactive soft actuators.

Flexible electrode films with good film-forming properties, large deformation ability, high conductivity, and strong charge and discharge capabilities are crucial for ionic electroactive polymer soft actuators. However, there are still challenges in preparing high-quality electrode films that can combine well with the intermediate polyelectrolyte to form high-performance soft actuators. Herein, we propose an advanced sandwich ionic electroactive actuator utilizing self-standing bacterial cellulose (BC) reinforced poly(3,4-ethylenedioxythiophene)/poly(4-styrenesulfonate) (PP) doped with graphene oxide (GO) conductive composite electrodes and a Nafion ion-exchange membrane via a hot-pressing method. The prepared BC-PP-GO electrodes have good film-forming properties with a Young's modulus of 1360 MPa and a high conductivity of 150 S cm-1. The hot-pressed BC-PP-GO/Nafion ionic actuator exhibited a large bending displacement of 6.2 mm (1 V, 0.1 Hz) with a long-term actuation stability up to 95% over 360 cycles without degradation. Furthermore, we introduced the actuator's potential applications including bionic grippers, flies, and fish, providing more opportunities for the development of next-generation micromanipulators and biomimetic microrobots in cm-scale space.

Superstretchable Liquid-Metal Electrodes for Dielectric Elastomer Transducers and Flexible Circuits.

Dielectric elastomer transducers (DETs), with a dielectric elastomer (DE) film sandwiched between two compliant electrodes, are highly sought after in the fields of soft robotics, energy harvesting, and human-machine interaction. To achieve a high-performance DET, it is essential to develop electrodes with high conductivity, strain-insensitive resistance, and adaptability. Herein, we design an electrode (Supra-LMNs) based on multiple dynamic bond cross-linked supramolecular networks (Ns) and liquid metal (LM), which realizes high conductivity (up to 16,000 S cm-1), negligible resistance changes at high strain (1.3-fold increase at 1000% strain), instantaneous self-healability at ambient temperature, and rapid recycling. The conductive pathway can be activated through simple friction by transmitting stress through the silver nanowires (AgNWs) and cross-linking sites of LM particles. This method is especially attractive for printing circuits on flexible substrates, especially DE films. Utilized as dielectric elastomer generator (DEG) electrodes, it reduces the charge loss by 3 orders of magnitude and achieves high generating energy density and energy conversion efficiency on a low-resistance load. Additionally, serving as sensor (DES) and actuator (DEA) electrodes, it enables a highly sensitive sensing capability and complex interaction.

Development of a miniaturized PZT-based MEMS Fabry-Perot interferometer with eutectic wafer bonding and its interface electronics

A miniaturized lead zirconate titanate (PZT)-actuated Fabry-Perot interferometer (FPI) was developed for an 850 nm light beam selection by modulating the air gap between two refractive mirrors. The developed FPI consists of mirrors, a PZT actuator for air gap modulation, metal electrodes, and interface electronics capable of applying a square voltage at a frequency of 0.1 Hz. Eutectic wafer bonding method was employed to bond two mirrors through rapid thermal annealing (RTA) and applying mechanical pressure for a short time to minimize the interdiffusion between layers. The PZT actuator and metal electrodes serve as a thickness spacer to create an air gap between the two mirror plates. Alternating high and low dielectric layers (TiO2 and SiO2) with precise thickness and high crystallization quality were utilized for the formation of the refractive mirror because these layers offer high reflectivity and low absorption loss, enabling effective transmission of a specific wavelength in the incident light beam. By applying 0.1 Hz square pulses to the PZT actuator, the air gap was modulated, resulting in significant shifts in the center wavelength of the filtered beam at the desired wavelength. The study demonstrates the successful modulation and optimization of transmission peaks, ensuring a sharp full width at half maximum (FWHM) and high transmission rate. It also provides comprehensive experimental process factors for optimizing heat treatment conditions for PZT and refractive mirrors, minimizing metal interdiffusion between the dielectric layers, and ensuring mirror plate flatness. The device parameter effects such as cavity length orders, sequence of refractive indices for dielectric layers, and the extent of elongation of PZT with applied voltage were systematically studied to achieve optimal performance of FPI filter. The developed interface electronics allow voltage modulation up to 21.9 V at a frequency of 0.1 Hz, while preserving the elasticity of the PZT actuator.

Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces

Here, we present a model, design, static and dynamic testing, and analysis of an electrostatic curved electrode actuator in deionized water. The actuator is integrated within a microfluidic device designed for high throughput cell sorting. The actuator shifts the bifurcation point of a Y-shaped microfluidic channel to simultaneously increase the width of one channel while decreasing the width of another channel, thus changing the bias in hydrodynamic resistance between outlet channels. The actuator is modeled as a clamped-roller beam and the static displacement is calculated based on Rayleigh–Ritz energy methods. The model accounts for oxide growth and surface roughness that occurs during fabrication. We observe that modeling a rough contact surface improves the maximum displacement prediction to within less than 20% error from the experimental value. Additionally, the model predicts a release voltage within less than 8% error of the experimental value. We also present dynamic experiments to test the actuator displacement at frequencies from 1 to 4096 Hz and show that the actuator achieves large displacements (8 µm) at high frequencies (100 Hz).

Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures

This work describes the design, fabrication, modeling, and testing of monolithic micromachined parylene-based electroactive membranes (µPEMs) with embedded microfluidic channels. The design and modeling employed analytical plate theory to determine the optimal membrane dimensions and structural shapes for various microsystem designs. The µPEMs were fabricated using a combination of surface and bulk micromachining techniques incorporating Parylene C as a biocompatible polymeric structural material combined with patterned electrodes for actuation. Experimental actuation of the electroactive membranes demonstrated reliability with minimal voltage shifts, and theoretical pull-in voltages closely matching experimental results. Different structural parameters of the µPEMs were also tested, such as varying the overall membrane thickness/structural rigidity and actuation chamber depth. Dynamic actuation of the membrane, including, the deflection and system response to various actuation frequencies, was observed and quantified via optical coherence tomography techniques. Microfluidic architectures were monolithically integrated with the membrane actuator and successfully perfused, with no signs of leakage. This compact microsystem has potential applications in microfluidics and Lab/System-On-a-Chip devices, for use in micromixers, particle manipulators, and applying strain to adherent cells cultured on top of the membrane.

Measurement of the temperature dependence of mechanical losses induced by an electric field in undoped silicon disk resonators

Test masses of future laser interferometric gravitational-wave detectors will be made of high-purity silicon and cooled, in particular, to 123 K in the LIGO Voyager project. Electrostatic actuators are supposed to be used to tune the test mass position. Capacitive coupling of the actuator electrodes with the silicon test mass results in the mechanical loss caused by electric currents flowing in silicon having a finite resistivity. This loss is a cause of additional thermal noise. In this study, we present the results of temperature dependence of the electric field induced loss in the bending vibration mode of commercial disk-shaped undoped silicon wafers in the temperature range of 100–295 K.

Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

A novel technology for the precise fabrication of quartz resonators for MEMS applications is introduced. This approach is based on the laser-induced chemical etching of quartz. The main processing steps include femtosecond UV laser treatment of a Cr-Au-coated Z-cut alpha quartz wafer, followed by wet etching. The laser-patterned Cr-Au coating serves as an etch mask and is used to form electrodes for piezoelectric actuation. This fabrication approach does not alter the quartz’s crystalline structure or its piezo-electric properties. The formation of defects, which is common in laser micromachined quartz, is prevented by optimized process parameters and by controlling the temporal behavior of the laser-matter interactions. The process does not involve any lithography and allows for high geometric design flexibility. Several configurations of piezoelectrically actuated beam-type resonators were fabricated using relatively mild wet etching conditions, and their functionality was experimentally demonstrated. The devices are distinguished from prior efforts by the reduced surface roughness and improved wall profiles of the fabricated quartz structures.

Asymmetric electrodes for droplet directional actuation by a square wave on an open surface

The large-scale electrowetting-on-dielectric (EWOD) digital microfluidic platforms always require complex electrode-addressing schemes and high-cost fabrication methods of dielectric and hydrophobic layers. Hence, the voltage polarity-dependent electrowetting was used to actuate droplets with asymmetric printed circuit board (PCB) electrodes on an open slippery liquid-infused porous surface (SLIPS) chip. The V-shaped, convex-shaped, and curve-shaped coplanar asymmetric electrode arrays were designed to achieve the directional motion of a droplet by a square wave voltage signal. The operation ranges of voltage amplitude and frequency for continuously actuating a 10 µl droplet were obtained on the three asymmetric electrode arrays. Our results found that the curve-shaped electrode array has a broader voltage operation range than the other two for continuous pumping of a 10 µl droplet. It is because the droplet has a long effective width of contact line with the front curve-shaped electrode and does not overlap with the rear electrode during the movement. Meanwhile, a reconfigurable convex-shaped electrode structure was also proposed to achieve bidirectional actuation of a droplet by controlling the square wave voltage. This work provides a low-cost, straightforward electrode-addressing scheme for designing digital microfluidic devices.

Study and simulation of MEMS electrostatic actuators

The desire for cutting-edge technologies is at an all-time high as the world becomes more digital. To suit the unique requirements, numerous systems and their associated devices are on the market. One such developing technology for producing devices is Micro Electro Mechanical System (MEMS). The simplest description of MEMS technology is the combination of tiny mechanical and electromechanical components on a single chip using micromanufacturing techniques. Its benefits include low cost, lightweight, accurate measurement in small places, and low power usage. The main objective of this proposed work is to design, analyze and compare various electrostatic actuators. Analyses of the device's electrostatic actuation, capacitive sensing, displacement, Eigen frequency, resonant frequency, time domain response of parallel plate actuation electrodes with variable gap actuator, differential capacitive sensing, parallel plate capacitance, and balanced actuation are all done in-depth.

Detection Methods for Multi-Modal Inertial Gas Sensors.

We investigate the rich potential of the multi-modal motions of electrostatically actuated asymmetric arch microbeams to design higher sensitivity and signal-to-noise ratio (SNR) inertial gas sensors. The sensors are made of fixed-fixed microbeams with an actuation electrode extending over one-half of the beam span in order to maximize the actuation of asymmetry. A nonlinear dynamic reduced-order model of the sensor is first developed and validated. It is then deployed to investigate the design of sensors that exploit the spatially complex and dynamically rich motions that arise due to veering and modal hybridization between the first symmetric and the first anti-symmetric modes of the beam. Specifically, we compare among the performance of four sensors implemented on a common platform using four detection mechanisms: classical frequency shift, conventional bifurcation, modal ratio, and differential capacitance. We find that frequency shift and conventional bifurcation sensors have comparable sensitivities. On the other hand, modal interactions within the veering range and modal hybridization beyond it offer opportunities for enhancing the sensitivity and SNR of bifurcation-based sensors. One method to achieve that is to use the modal ratio between the capacitances attributed to the symmetric and asymmetric modes as a detector, which increases the detection signal by three orders of magnitude compared to a conventional bifurcation sensor. We also present a novel sensing mechanism that exploits a rigid arm extending transversely from the arch beam mid-point and placed at equal distances between two side electrodes. It uses the asymmetry of the arch beam motions to induce rotary motions and realize a differential sensor. It is found to increase the detection signal by two orders of magnitude compared to a conventional bifurcation sensor.

Enhanced Robustness of a Bridge-Type Rf-Mems Switch for Enabling Applications in 5G and 6G Communications.

In this paper, new suspended-membrane double-ohmic-contact RF-MEMS switch configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or three anchoring points, are designed and optimized to minimize membrane deformation due to residual fabrication stresses, thus exhibiting smaller mechanical deformation and a higher stiffness with more release force than previously designed single diagonal beam suspensions. The two-anchor DDGs are designed in two different orientations, in-line and 90°-rotated. The membrane may include a window to minimize the coupling to the lower electrode. The devices are integrated in a coplanar-waveguide transmission structure and fabricated using an eight-mask surface-micro-machining process on high-resistivity silicon, with dielectric-free actuation electrodes, and including glass protective caps. The RF-MEMS switch behavior is assessed from measurements of the device S parameters in ON and OFF states. The fabricated devices feature a measured pull-in voltage of 76.5 V/60 V for the windowed/not-windowed two-anchor DDG membranes, and 54 V/49.5 V for the windowed/not-windowed three-anchor DDG membranes, with a good agreement with mechanical 3D simulations. The measured ON-state insertion loss is better than 0.7 dB/0.8 dB and the isolation in the OFF state is better than 40 dB/31 dB up to 20 GHz for the in-line/90°-rotated devices, also in good agreement with 2.5D electromagnetic simulations.