Abstract
The desire for cutting-edge technologies is at an all-time high as the world becomes more digital. To suit the unique requirements, numerous systems and their associated devices are on the market. One such developing technology for producing devices is Micro Electro Mechanical System (MEMS). The simplest description of MEMS technology is the combination of tiny mechanical and electromechanical components on a single chip using micromanufacturing techniques. Its benefits include low cost, lightweight, accurate measurement in small places, and low power usage. The main objective of this proposed work is to design, analyze and compare various electrostatic actuators. Analyses of the device's electrostatic actuation, capacitive sensing, displacement, Eigen frequency, resonant frequency, time domain response of parallel plate actuation electrodes with variable gap actuator, differential capacitive sensing, parallel plate capacitance, and balanced actuation are all done in-depth.
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