The process of beam formation in a supersonic expansion into a high pressure (10 −2 -1 Torr) expansion chamber, a so-called Campargue-type beam source, has been investigated, using the theoretical frame work of an ideal undisturbed expansion as a reference. Absolute values of the centre-line intensity I(O) expt have been measured as a function of the reservoir pressure p o at three different pumping speeds in the range of 25-230 l/s for the gases He, Ne and Ar. These experimental results have been used to determine a model description of the two characteristic features of a Campargue-type expansion, i-e. the nozzle-skimmer distance z am (p o) of maximum intensity at each value of the reservoir pressure p o and the skimmer transmission probability T a(z am-I(O) expt/I(0) in this maximum, using the centre-line intensity I(O) of an ideal undisturbed expansion as a reference. A simple model function T a (z am = q 1 expt-q 2Kn a − (z am) gives a perfect description, when using an inverse skimmer Knudsen number Kn a −1 with a mean free path based on the long-range van der Waals interactions that dominate the collisions at the low temperatures of the flow field at the skimmer orifice. The value of z am can be described by a non-dimensional length c which measures the distance z M - Z am. with z M the position of the Mach disk, in units of the viscosity based mean free path. Using the model functions for z am and T 3(z am) as input we present scaling laws that predict the performance of a Campargue type beam source as a function of the gas properties (van der waals constant C 6, mass m, viscosity based cross section Q vimc), the reservoir conditions (nozzle radius, reservoir pressure p o and temperature T o) and the parameters of the experimental arrangement (skimmer radius, temperature of the expansion chamber, pumping speed S). Measured values for He and Ne of the maximum maximorum J(O) expt mmm, i.e, the maximum of I (O) expt as a function of p o, are well described by the scaling law presented. Preliminary measurements of the dependency of I(O) expt mm on the reservoir temperature T o are also in good agreement with our scaling law which predicts I(O) expt mm T o ii/g. Heating the nozzle is an inexpensive way of increasing the centre-line intensity, as compared to the expensive approach of increasing pumping speed with a dependency I(O) expt mm S 7 9 . Typical values of I(O) expt mm at room temperature are 1.5x10 20 and 33x10 19 s −1 sr- −1 for He at S = 230 l s −1 and Ne at S = 180 l s −1, respectively, showing a favourable comparison to conventional low-pressure expansions with oil diffusion pumps in the expansion chamber. Measurements of the virtual source radius, i.e. a mapping of the velocity component perpendicular to the stream lines, provide design rules for the ratio of skimmer radiu s to nozzle radius required for optimum performance. Moreover, they provide qualitative support of our model description of the loss processes at the skimmer orifice.